Title

Litho-friendly decomposition method for self-aligned double patterning

Author's Department

Electronics & Communications Engineering Department

Find in your Library

https://doi.org/10.1109/TVLSI.2012.2212473

Document Type

Research Article

Publication Title

IEEE Transactions on Very Large Scale Integration (VLSI) Systems

Publication Date

1-1-2013

doi

10.1109/TVLSI.2012.2212473

First Page

1469

Last Page

1480

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