Litho-friendly decomposition method for self-aligned double patterning
Author's Department
Electronics & Communications Engineering Department
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https://doi.org/10.1109/TVLSI.2012.2212473
Document Type
Research Article
Publication Title
IEEE Transactions on Very Large Scale Integration (VLSI) Systems
Publication Date
1-1-2013
doi
10.1109/TVLSI.2012.2212473
First Page
1469
Last Page
1480
Recommended Citation
APA Citation
Mirsaeedi, M.
Torres, A.
&
Anis, M.
(2013). Litho-friendly decomposition method for self-aligned double patterning. IEEE Transactions on Very Large Scale Integration (VLSI) Systems, 21(8), 1469–1480.
10.1109/TVLSI.2012.2212473
https://fount.aucegypt.edu/faculty_journal_articles/2055
MLA Citation
Mirsaeedi, Minoo, et al.
"Litho-friendly decomposition method for self-aligned double patterning." IEEE Transactions on Very Large Scale Integration (VLSI) Systems, vol. 21,no. 8, 2013, pp. 1469–1480.
https://fount.aucegypt.edu/faculty_journal_articles/2055