Karim Ahmed

Abstract

As continued scaling down of transistors becomes increasingly difficult due to physical and technical issues like the increase of leakage power and total power consumption, overall, 3D integration is now considered a viable solution to get a higher bandwidth and power efficiency. Use of Through-silicon-vias (TSVs), which connects stacked structures die-to-die, is expected to be one of the most important techniques enabling 3D integration. As the number of through silicon Vias (TSVs) exists in the same chip is increasing, an algorithm to build a macro-model is needed to find inter-relationship between TSVs. There are different coupling parameters that exist between TSVs like: capacitive, inductive and resistive coupling. This work provides an algorithm to build a macro-model of an array of TSVs where only capacitive coupling is considered, as it is expected to be the dominating parameter.Using a simulation based technique, where characterization for bundles of TSVs were done and a scaling equation that can give the variationsoccur to capacitance value with scaling the physical dimensions of the TSV (pitch, radius, length and dielectric thickness (tox)) is proposed. The considered ranges for the physical parameters are: radius (from 1um to 10um), tox (from 0.1um to 0.5 um), length (from 10um to 100um) and pitch (from 10um to 95um). Using theproposed algorithm, a macro model can be built in a negligible time, which provides lots of time saving compared to hours required by other tools such as EM simulators or device simulators. The average error range 3% to 6%and a maximum cumulative error of algorithm and usage of scaling equation is 18.2% that occurs at very few dimensions and in very few capacitances from the extracted capacitance values, for both self and coupling capacitance.

Department

Electronics & Communications Engineering Department

Degree Name

MS in Electronics & Communication Engineering

Graduation Date

2-1-2013

Submission Date

January 2013

First Advisor

Ismail, Yehea

Committee Member 1

El Rouby, Alaa

Committee Member 2

Yahya, Eslam

Extent

113 p.

Document Type

Master's Thesis

Library of Congress Subject Heading 1

Semiconductor industry.

Library of Congress Subject Heading 2

Microfabrication.

Rights

The author retains all rights with regard to copyright. The author certifies that written permission from the owner(s) of third-party copyrighted matter included in the thesis, dissertation, paper, or record of study has been obtained. The author further certifies that IRB approval has been obtained for this thesis, or that IRB approval is not necessary for this thesis. Insofar as this thesis, dissertation, paper, or record of study is an educational record as defined in the Family Educational Rights and Privacy Act (FERPA) (20 USC 1232g), the author has granted consent to disclosure of it to anyone who requests a copy.

Institutional Review Board (IRB) Approval

Not necessary for this item

Comments

CND

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