Finite element analysis of SAW sensor with ZnO substrate for dichloromethane (DCM) gas detection
Author's Department
Computer Science & Engineering Department
Find in your Library
https://doi.org/10.24425/aoa.2021.138135
Document Type
Research Article
Publication Title
Archives of Acoustics
Publication Date
1-1-2021
doi
10.24425/aoa.2021.138135
Abstract
A SAW gas sensor based on Zinc Oxide (ZnO) piezoelectric substrate is simulated and evaluated for the detection of the dichloromethane (DCM) volatile organic compound (VOC). The study is performed based on the finite element method (FEM) using COMSOL Multiphysics software. The obtained device response using the ZnO substrate is compared to the one using the typical lithium niobate (LiNbO3) piezoelectric substrate. A thin film of polyisobutylene (PIB) membrane is selected to act as the sensing layer. The obtained results reveal a linear behaviour of the resonance frequency downshift (i.e., the sensor sensitivity) versus the investigated gas concentrations varying from 10 ppm to 100 ppm of DCM gas. Additionally, the sensor response is investigated by applying several thicknesses of PIB ranging from 0.3 µm to 1.0 µm. The observed sensor response shows less dependence on the PIB thickness using the ZnO substrate than the LiNbO3 one.
First Page
419
Last Page
426
Recommended Citation
APA Citation
Moustafa, M.
Laouini, G.
&
Alzoubi, T.
(2021). Finite element analysis of SAW sensor with ZnO substrate for dichloromethane (DCM) gas detection. Archives of Acoustics, 46(3), 419–426.
10.24425/aoa.2021.138135
https://fount.aucegypt.edu/faculty_journal_articles/2701
MLA Citation
Moustafa, Mohamed, et al.
"Finite element analysis of SAW sensor with ZnO substrate for dichloromethane (DCM) gas detection." Archives of Acoustics, vol. 46,no. 3, 2021, pp. 419–426.
https://fount.aucegypt.edu/faculty_journal_articles/2701