Title

Nonlinear dynamics of spring softening and hardening in folded-mems comb drive resonators

Author's Department

Physics Department

Find in your Library

https://doi.org/10.1109/JMEMS.2011.2148162

Document Type

Research Article

Publication Title

Journal of Microelectromechanical Systems

Publication Date

8-1-2011

doi

10.1109/JMEMS.2011.2148162

First Page

943

Last Page

958

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