Nonlinear dynamics of spring softening and hardening in folded-mems comb drive resonators

Authors

Amro M. Elshurafa, King Abdullah University of Science and Technology
Kareem Khirallah, American University in Cairo
Hani H. Tawfik, American University in Cairo
Ahmed Emira, King Abdullah University of Science and Technology
Ahmed K.S. Abdel Aziz, University of Waterloo
Sherif M. Sedky, American University in CairoFollow

Author's Department

Physics Department

Find in your Library

https://doi.org/10.1109/JMEMS.2011.2148162

Document Type

Research Article

Publication Title

Journal of Microelectromechanical Systems

Publication Date

8-1-2011

doi

10.1109/JMEMS.2011.2148162

First Page

943

Last Page

958

Recommended Citation

APA Citation

Elshurafa, A. Khirallah, K. Tawfik, H. Emira, A. ... (2011). Nonlinear dynamics of spring softening and hardening in folded-mems comb drive resonators. Journal of Microelectromechanical Systems, 20(4), 943–958. https://doi.org/10.1109/JMEMS.2011.2148162

MLA Citation

Elshurafa, Amro M., et al. "Nonlinear dynamics of spring softening and hardening in folded-mems comb drive resonators." Journal of Microelectromechanical Systems, vol. 20, no. 4, 2011, pp. 943–958.
https://doi.org/10.1109/JMEMS.2011.2148162