Nonlinear dynamics of spring softening and hardening in folded-mems comb drive resonators
Author's Department
Physics Department
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https://doi.org/10.1109/JMEMS.2011.2148162
Document Type
Research Article
Publication Title
Journal of Microelectromechanical Systems
Publication Date
8-1-2011
doi
10.1109/JMEMS.2011.2148162
First Page
943
Last Page
958
Recommended Citation
APA Citation
Elshurafa, A.
Khirallah, K.
Tawfik, H.
Emira, A.
...
(2011). Nonlinear dynamics of spring softening and hardening in folded-mems comb drive resonators. Journal of Microelectromechanical Systems, 20(4), 943–958.
10.1109/JMEMS.2011.2148162
https://fount.aucegypt.edu/faculty_journal_articles/2228
MLA Citation
Elshurafa, Amro M., et al.
"Nonlinear dynamics of spring softening and hardening in folded-mems comb drive resonators." Journal of Microelectromechanical Systems, vol. 20,no. 4, 2011, pp. 943–958.
https://fount.aucegypt.edu/faculty_journal_articles/2228