Microencapsulation of silicon cavities using a pulsed excimer laser
Author's Department
Physics Department
Find in your Library
https://doi.org/10.1088/0960-1317/22/7/075012
Document Type
Research Article
Publication Title
Journal of Micromechanics and Microengineering
Publication Date
7-1-2012
doi
10.1088/0960-1317/22/7/075012
Recommended Citation
APA Citation
Sedky, S.
Tawfik, H.
Ashour, M.
Graham, A.
...
(2012). Microencapsulation of silicon cavities using a pulsed excimer laser. Journal of Micromechanics and Microengineering, 22(7),
10.1088/0960-1317/22/7/075012
https://fount.aucegypt.edu/faculty_journal_articles/2127
MLA Citation
Sedky, S., et al.
"Microencapsulation of silicon cavities using a pulsed excimer laser." Journal of Micromechanics and Microengineering, vol. 22,no. 7, 2012,
https://fount.aucegypt.edu/faculty_journal_articles/2127