Title

SiGe MEMS at processing temperatures below 250°C

Author's Department

Physics Department

Find in your Library

https://doi.org/10.1016/j.sna.2012.01.035

Document Type

Research Article

Publication Title

Sensors and Actuators, A: Physical

Publication Date

12-1-2012

doi

10.1016/j.sna.2012.01.035

First Page

230

Last Page

239

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