Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer
Author's Department
Physics Department
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https://doi.org/10.1007/s00542-012-1714-7
Document Type
Research Article
Publication Title
Microsystem Technologies
Publication Date
8-1-2013
doi
10.1007/s00542-012-1714-7
First Page
1153
Last Page
1163
Recommended Citation
APA Citation
Sharaf, A.
&
Sedky, S.
(2013). Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer. Microsystem Technologies, 19(8), 1153–1163.
10.1007/s00542-012-1714-7
https://fount.aucegypt.edu/faculty_journal_articles/1966
MLA Citation
Sharaf, Abdelhameed, et al.
"Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer." Microsystem Technologies, vol. 19,no. 8, 2013, pp. 1153–1163.
https://fount.aucegypt.edu/faculty_journal_articles/1966
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