Effect of localized laser treatment on fatigue performance of single-crystal silicon microstructures
Author's Department
Physics Department
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Document Type
Research Article
Publication Title
Sensors and Materials
Publication Date
1-1-2016
doi
10.18494/SAM.2016.1162
First Page
121
Last Page
129
Recommended Citation
APA Citation
Mitwally, M.
Tsuchiya, T.
Tabata, O.
&
Sedky, S.
(2016). Effect of localized laser treatment on fatigue performance of single-crystal silicon microstructures. Sensors and Materials, 28(2), 121–129.
10.18494/SAM.2016.1162
https://fount.aucegypt.edu/faculty_journal_articles/1601
MLA Citation
Mitwally, Mohamed E., et al.
"Effect of localized laser treatment on fatigue performance of single-crystal silicon microstructures." Sensors and Materials, vol. 28,no. 2, 2016, pp. 121–129.
https://fount.aucegypt.edu/faculty_journal_articles/1601