Model-Based Initial Bias (MIB): Toward a Single-Iteration Optical Proximity Correction

Author's Department

Electronics & Communications Engineering Department

Find in your Library

https://doi.org/10.1109/TCAD.2015.2512908

Document Type

Research Article

Publication Title

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Publication Date

10-1-2016

doi

10.1109/TCAD.2015.2512908

First Page

1630

Last Page

1639

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