Model-Based Initial Bias (MIB): Toward a Single-Iteration Optical Proximity Correction
Author's Department
Electronics & Communications Engineering Department
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https://doi.org/10.1109/TCAD.2015.2512908
Document Type
Research Article
Publication Title
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Publication Date
10-1-2016
doi
10.1109/TCAD.2015.2512908
First Page
1630
Last Page
1639
Recommended Citation
APA Citation
Hamouda, A.
Anis, M.
&
Karim, K.
(2016). Model-Based Initial Bias (MIB): Toward a Single-Iteration Optical Proximity Correction. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 35(10), 1630–1639.
10.1109/TCAD.2015.2512908
https://fount.aucegypt.edu/faculty_journal_articles/1295
MLA Citation
Hamouda, Ayman, et al.
"Model-Based Initial Bias (MIB): Toward a Single-Iteration Optical Proximity Correction." IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol. 35,no. 10, 2016, pp. 1630–1639.
https://fount.aucegypt.edu/faculty_journal_articles/1295