Semiconductor plasmonic gas sensor using on-chip infrared spectroscopy

Funding Sponsor

Intel Corporation

Author's Department

Electronics & Communications Engineering Department

Find in your Library

https://doi.org/10.1007/s00339-016-0707-2

Document Type

Research Article

Publication Title

Applied Physics A: Materials Science and Processing

Publication Date

1-1-2017

doi

10.1007/s00339-016-0707-2

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