Fabrication of optical filters using multilayered porous silicon

Fabrication of optical filters using multilayered porous silicon

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Department

Physics Department

Abstract

[abstract not available]

Publication Date

4-11-2011

Document Type

Book Chapter

Book Title

Proceedings of SPIE - The International Society for Optical Engineering

ISBN

SCOPUS_ID:79953710549

Publisher

SPIE

City

San Francisco, CA

First Page

1

Last Page

9

Keywords

1-D photonic structure, Electrochemical etching of silicon, Optical interference filters, Optical parameters measurement, Porous silicon, Thin films

Fabrication of optical filters using multilayered porous silicon

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