Self-aligned double patterning (SADP) friendly detailed routing
Files
Department
Electronics & Communications Engineering Department
Abstract
[abstract not available]
Publication Date
5-16-2011
Document Type
Book Chapter
Book Title
Proceedings of SPIE - The International Society for Optical Engineering
ISBN
SCOPUS_ID:79955817946
Publisher
SPIE
City
San Jose, CA
First Page
1
Last Page
9
Keywords
DFM, Double patterning lithography, Layout decomposition, SADP
Recommended Citation
APA Citation
Mirsaeedi, M.
Torres, J.
&
Anis, M.
(2011). Self-aligned double patterning (SADP) friendly detailed routing. Proceedings of SPIE - The International Society for Optical Engineering (pp. 1-9). SPIE.
MLA Citation
Mirsaeedi, Minoo, et al.
"Self-aligned double patterning (SADP) friendly detailed routing." Proceedings of SPIE - The International Society for Optical Engineering, SPIE, 2011. pp. 1-9