Self-aligned double patterning (SADP) layout decomposition

Authors

Minoo Mirsaeedi, University of Waterloo
J. Andres Torres, Mentor Graphics Corporation
Mohab Anis, American University in CairoFollow

Files

Department

Electronics & Communications Engineering Department

Abstract

[abstract not available]

Publication Date

6-22-2011

Document Type

Book Chapter

Book Title

Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011

ISBN

SCOPUS_ID:79959224043

Publisher

IEEE

City

Santa Clara, CA

First Page

103

Last Page

109

Recommended Citation

APA Citation

Mirsaeedi, M. Torres, J. & Anis, M. (2011).Self-aligned double patterning (SADP) layout decomposition. IEEE. , 103-109
https://fount.aucegypt.edu/faculty_book_chapters/711

MLA Citation

Mirsaeedi, Minoo, et al. Self-aligned double patterning (SADP) layout decomposition. IEEE, 2011.pp. 103-109
https://fount.aucegypt.edu/faculty_book_chapters/711