Self-aligned double patterning (SADP) layout decomposition
Files
Department
Electronics & Communications Engineering Department
Abstract
[abstract not available]
Publication Date
6-22-2011
Document Type
Book Chapter
Book Title
Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011
ISBN
SCOPUS_ID:79959224043
Publisher
IEEE
City
Santa Clara, CA
First Page
103
Last Page
109
Recommended Citation
APA Citation
Mirsaeedi, M.
Torres, J.
&
Anis, M.
(2011). Self-aligned double patterning (SADP) layout decomposition. Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011 (pp. 103-109). IEEE.
MLA Citation
Mirsaeedi, Minoo, et al.
"Self-aligned double patterning (SADP) layout decomposition." Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, IEEE, 2011. pp. 103-109