Aerial Image retargeting (AIR): Achieving Litho-Friendly designs
Files
Department
Electronics & Communications Engineering Department
Abstract
[abstract not available]
Publication Date
5-16-2011
Document Type
Book Chapter
Book Title
Proceedings of SPIE - The International Society for Optical Engineering
ISBN
SCOPUS_ID:79955819177
Publisher
SPIE
City
San Jose, CA
First Page
1
Last Page
8
Keywords
Aerial Image, DFM, LFD, Model-based retargeting, OPC, Process window, RET
Recommended Citation
APA Citation
Hamouda, A.
Word, J.
Anis, M.
&
Karim, K.
(2011).Aerial Image retargeting (AIR): Achieving Litho-Friendly designs. SPIE. , 1-8
https://fount.aucegypt.edu/faculty_book_chapters/716
MLA Citation
Hamouda, Ayman Yehia, et al.
Aerial Image retargeting (AIR): Achieving Litho-Friendly designs. SPIE, 2011.pp. 1-8
https://fount.aucegypt.edu/faculty_book_chapters/716