Aerial Image retargeting (AIR): Achieving Litho-Friendly designs

Authors

Ayman Yehia Hamouda, Mentor Graphics Corporation
James Word, Mentor Graphics Corporation
Mohab Anis, American University in CairoFollow
Karim S. Karim, University of Waterloo

Files

Department

Electronics & Communications Engineering Department

Abstract

[abstract not available]

Publication Date

5-16-2011

Document Type

Book Chapter

Book Title

Proceedings of SPIE - The International Society for Optical Engineering

ISBN

SCOPUS_ID:79955819177

Publisher

SPIE

City

San Jose, CA

First Page

1

Last Page

8

Keywords

Aerial Image, DFM, LFD, Model-based retargeting, OPC, Process window, RET

Recommended Citation

APA Citation

Hamouda, A. Word, J. Anis, M. & Karim, K. (2011). Aerial Image retargeting (AIR): Achieving Litho-Friendly designs. Proceedings of SPIE - The International Society for Optical Engineering (pp. 1-8). SPIE.

MLA Citation

Hamouda, Ayman Yehia, et al. "Aerial Image retargeting (AIR): Achieving Litho-Friendly designs." Proceedings of SPIE - The International Society for Optical Engineering, SPIE, 2011. pp. 1-8