AIR (Aerial Image Retargeting): A novel technique for in-fab automatic model-based retargeting-for-yield

AIR (Aerial Image Retargeting): A novel technique for in-fab automatic model-based retargeting-for-yield

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Department

Electronics & Communications Engineering Department

Abstract

[abstract not available]

Publication Date

1-1-2012

Document Type

Book Chapter

Book Title

Proceedings -Design, Automation and Test in Europe, DATE

ISBN

SCOPUS_ID:84862086458

Publisher

IEEE

City

Dresden, Germany

First Page

1603

Last Page

1608

Keywords

DFM, LFD, lithography Friendly Design, Optical Proximity Correction, PWOPC, Resolution Enhancement Techniques, RET

AIR (Aerial Image Retargeting): A novel technique for in-fab automatic model-based retargeting-for-yield

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