Author

Joseph Zekry

Abstract

This thesis describes the modeling and design issues of high force electrostatically actuated RFMEMS contact switches. Various reliability issues and challenges are associated with the design of RFMEMS contact switches. The reliability of microcontacts is of major importance in increasing the lifetime of such devices. A semi-analytical model based on the beam deflection theory is developed to calculate the contact force delivered by parallel-plate electrostatically actuated switch structures. The model is capable of fast and accurate static solution for complicated switch structures which are normally analyzed using finite element analysis techniques. High force designs are presented together with finite element simulations confirming the model results and reflecting on the reliability of these switch structures. The RF performance is expected to be comparable to recently announced commercial counterpart specifications. A simple all-metal surface micromachining technology providing thick electroplated nickel beams will be used to implement high force switch structures.

Department

Physics Department

Degree Name

MS in Physics

Date of Award

6-1-2007

Online Submission Date

February 2013

First Advisor

Shaarawi, Amr

Committee Member 1

Shaarawi, Amr

Committee Member 2

Tilmans, Harrie

Document Type

Thesis

Extent

113 p.

Rights

The author retains all rights with regard to copyright. The author certifies that written permission from the owner(s) of third-party copyrighted matter included in the thesis, dissertation, paper, or record of study has been obtained. The author further certifies that IRB approval has been obtained for this thesis, or that IRB approval is not necessary for this thesis. Insofar as this thesis, dissertation, paper, or record of study is an educational record as defined in the Family Educational Rights and Privacy Act (FERPA) (20 USC 1232g), the author has granted consent to disclosure of it to anyone who requests a copy. The author has granted the American University in Cairo or its agents a non-exclusive license to archive this thesis, dissertation, paper, or record of study, and to make it accessible, in whole or in part, in all forms of media, now or hereafter known.

IRB

Not necessary for this item

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