Abstract

This thesis describes the modeling and design issues of high force electrostatically actuated RFMEMS contact switches. Various reliability issues and challenges are associated with the design of RFMEMS contact switches. The reliability of microcontacts is of major importance in increasing the lifetime of such devices. A semi-analytical model based on the beam deflection theory is developed to calculate the contact force delivered by parallel-plate electrostatically actuated switch structures. The model is capable of fast and accurate static solution for complicated switch structures which are normally analyzed using finite element analysis techniques. High force designs are presented together with finite element simulations confirming the model results and reflecting on the reliability of these switch structures. The RF performance is expected to be comparable to recently announced commercial counterpart specifications. A simple all-metal surface micromachining technology providing thick electroplated nickel beams will be used to implement high force switch structures.

Department

Physics Department

Degree Name

MS in Physics

Date of Award

6-1-2007

Online Submission Date

2-3-2013

First Advisor

Shaarawi, Amr

Committee Member 1

Shaarawi, Amr

Committee Member 2

Tilmans, Harrie

Document Type

Thesis

Extent

113 p.

Rights

The author retains all rights with regard to copyright.

The American University in Cairo grants authors of theses and dissertations a maximum embargo period of two years from the date of submission, upon request. After the embargo elapses, these documents are made available publicly. If you are the author of this thesis or dissertation, and would like to request an exceptional extension of the embargo period, please write to thesisadmin@aucegypt.edu.

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