Spatial beam splitting for fully integrated MEMS interferometer
Files
Department
Physics Department
Description
[abstract not available]
Publication Date
6-12-2013
Document Type
Book Chapter
Book Title
Proceedings of SPIE - The International Society for Optical Engineering
Editors
Yong-Hwa Park; Wibool Piyawattanametha;
ISBN
SCOPUS_ID:84878677784
Publisher
SPIE
City
San Francisco, California, United States
First Page
1
Last Page
9
Recommended Citation
APA Citation
Khirallah, K.
Ramsis, I.
Serry, M.
Swillam, M.
&
Sedky, S.
(2013).Spatial beam splitting for fully integrated MEMS interferometer. SPIE. , 1-9
https://fount.aucegypt.edu/faculty_book_chapters/575
MLA Citation
Khirallah, Kareem, et al.
Spatial beam splitting for fully integrated MEMS interferometer. SPIE, 2013.pp. 1-9
https://fount.aucegypt.edu/faculty_book_chapters/575