Spatial beam splitting for fully integrated MEMS interferometer
Files
Department
Physics Department
Abstract
[abstract not available]
Publication Date
6-12-2013
Document Type
Book Chapter
Book Title
Proceedings of SPIE - The International Society for Optical Engineering
Editors
Yong-Hwa Park; Wibool Piyawattanametha;
ISBN
SCOPUS_ID:84878677784
Publisher
SPIE
City
San Francisco, California, United States
First Page
1
Last Page
9
Recommended Citation
APA Citation
Khirallah, K.
Ramsis, I.
Serry, M.
Swillam, M.
&
Sedky, S.
(2013). Spatial beam splitting for fully integrated MEMS interferometer. In Yong-Hwa Park; Wibool Piyawattanametha; (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 1-9). SPIE.
MLA Citation
Khirallah, Kareem, et al.
"Spatial beam splitting for fully integrated MEMS interferometer." Proceedings of SPIE - The International Society for Optical Engineering, edited by Yong-Hwa Park; Wibool Piyawattanametha;, SPIE, 2013. pp. 1-9