"Spatial beam splitting for fully integrated MEMS interferometer" by Kareem Khirallah, Inas Ramsis et al.
 
Spatial beam splitting for fully integrated MEMS interferometer

Spatial beam splitting for fully integrated MEMS interferometer

Files

Department

Physics Department

Abstract

[abstract not available]

Publication Date

6-12-2013

Document Type

Book Chapter

Book Title

Proceedings of SPIE - The International Society for Optical Engineering

Editors

Yong-Hwa Park; Wibool Piyawattanametha;

ISBN

SCOPUS_ID:84878677784

Publisher

SPIE

City

San Francisco, California, United States

First Page

1

Last Page

9

Spatial beam splitting for fully integrated MEMS interferometer

Share

COinS