Study of the Substrate Materials and Thin Film Sensing Layer on the SAW Sensor Behaviour for VOCs

Study of the Substrate Materials and Thin Film Sensing Layer on the SAW Sensor Behaviour for VOCs

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Department

Physics Department

Abstract

[abstract not available]

Publication Date

4-1-2020

Document Type

Book Chapter

Book Title

2020 7th International Conference on Electrical and Electronics Engineering (ICEEE)

ISBN

SCOPUS_ID:85086460826

Publisher

IEEE

City

Antalya, Turkey

First Page

82

Last Page

85

Keywords

gas sensors, PIB film, surface acoustic wave (SAW), volatile organic compounds (VOC)

Study of the Substrate Materials and Thin Film Sensing Layer on the SAW Sensor Behaviour for VOCs

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