Silicon-plasmonic-integrated mid-infrared sensor using CMOS technology

Silicon-plasmonic-integrated mid-infrared sensor using CMOS technology

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Department

Physics Department

Abstract

[abstract not available]

Publication Date

1-1-2017

Document Type

Book Chapter

Book Title

Proceedings of SPIE - The International Society for Optical Engineering

ISBN

SCOPUS_ID:85019214278

Publisher

SPIE

City

San Francisco, CA

First Page

1

Last Page

6

Keywords

FDTD, heavily doped Silicon, mid infrared sensing, Plasmonics

Silicon-plasmonic-integrated mid-infrared sensor using CMOS technology

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