Title

Silicon Germanium as a novel mask for silicon deep reactive ion etching

Author's Department

Physics Department

Find in your Library

https://doi.org/10.1109/MEMSYS.2012.6170159

Document Type

Research Article

Publication Title

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Publication Date

5-7-2012

doi

10.1109/MEMSYS.2012.6170159

First Page

321

Last Page

324

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