Title

Microencapsulation of silicon cavities using a pulsed excimer laser

Author's Department

Physics Department

Find in your Library

https://doi.org/10.1088/0960-1317/22/7/075012

Document Type

Research Article

Publication Title

Journal of Micromechanics and Microengineering

Publication Date

7-1-2012

doi

10.1088/0960-1317/22/7/075012

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