Aerial Image retargeting (AIR): Achieving Litho-Friendly designs

Chapter Title

Aerial Image retargeting (AIR): Achieving Litho-Friendly designs

Files

Department

Electronics & Communications Engineering Department

Description

[abstract not available]

Publication Date

5-16-2011

Document Type

Book Chapter

Book Title

Proceedings of SPIE - The International Society for Optical Engineering

ISBN

SCOPUS_ID:79955819177

Publisher

SPIE

City

San Jose, CA

First Page

1

Last Page

8

Keywords

Aerial Image, DFM, LFD, Model-based retargeting, OPC, Process window, RET

Aerial Image retargeting (AIR): Achieving Litho-Friendly designs

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