Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C

Chapter Title

Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C

Files

Department

Physics Department

Description

[abstract not available]

Publication Date

9-30-2011

Document Type

Book Chapter

Book Title

Materials Research Society Symposium Proceedings

ISBN

SCOPUS_ID:80053207579

Publisher

Springer

City

Leuven, Belgium

First Page

73

Last Page

78

Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C

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