77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarization

Chapter Title

77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarization

Files

Department

Physics Department

Description

[abstract not available]

Publication Date

11-1-2011

Document Type

Book Chapter

Book Title

IEEE Antennas and Propagation Society, AP-S International Symposium (Digest)

ISBN

SCOPUS_ID:80054992237

Publisher

IEEE

City

Spokane, WA

First Page

2083

Last Page

2086

Keywords

Bulk Micromachining, Circular Polarization, Dipole Antennas, Linear Polarization, MEMS Antennas

77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarization

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