AIR (Aerial Image Retargeting): A novel technique for in-fab automatic model-based retargeting-for-yield
Files
Department
Electronics & Communications Engineering Department
Description
[abstract not available]
Publication Date
1-1-2012
Document Type
Book Chapter
Book Title
Proceedings -Design, Automation and Test in Europe, DATE
ISBN
SCOPUS_ID:84862086458
Publisher
IEEE
City
Dresden, Germany
First Page
1603
Last Page
1608
Keywords
DFM, LFD, lithography Friendly Design, Optical Proximity Correction, PWOPC, Resolution Enhancement Techniques, RET
Recommended Citation
APA Citation
Hamouda, A.
Anis, M.
&
Karim, K.
(2012).AIR (Aerial Image Retargeting): A novel technique for in-fab automatic model-based retargeting-for-yield. IEEE. , 1603-1608
https://fount.aucegypt.edu/faculty_book_chapters/664
MLA Citation
Hamouda, Ayman Yehia, et al.
AIR (Aerial Image Retargeting): A novel technique for in-fab automatic model-based retargeting-for-yield. IEEE, 2012.pp. 1603-1608
https://fount.aucegypt.edu/faculty_book_chapters/664