Spatial beam splitting for fully integrated MEMS interferometer

Chapter Title

Spatial beam splitting for fully integrated MEMS interferometer

Files

Department

Physics Department

Description

[abstract not available]

Publication Date

6-12-2013

Document Type

Book Chapter

Book Title

Proceedings of SPIE - The International Society for Optical Engineering

Editors

Yong-Hwa Park; Wibool Piyawattanametha;

ISBN

SCOPUS_ID:84878677784

Publisher

SPIE

City

San Francisco, California, United States

First Page

1

Last Page

9

Spatial beam splitting for fully integrated MEMS interferometer

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