Toward new design-rule-check of silicon photonics for automated layout physical verifications

Chapter Title

Toward new design-rule-check of silicon photonics for automated layout physical verifications

Files

Department

Physics Department

Description

[abstract not available]

Publication Date

1-1-2015

Document Type

Book Chapter

Book Title

Proceedings of SPIE - The International Society for Optical Engineering

Editors

Graham T Reed; Michael R WattS

ISBN

SCOPUS_ID:84928784111

Publisher

SPIE

City

San Francisco, California, United States

First Page

1

Last Page

7

Toward new design-rule-check of silicon photonics for automated layout physical verifications

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